Methods of simulating thin film deposition using spray pyrolysis techniques
نویسندگان
چکیده
Integration of thin tin oxide film formation into CMOS technology is a fundamental step to realize sensitive smart gas sensor devices. Spray pyrolysis is a deposition technique which has the potential to fulfil this requirement. A model for spray pyrolysis deposition is developed and implemented within a Level Set framework. Two models for the topography modification due to spray pyrolysis deposition are presented, with an electric and a pressure atomizing nozzle. The resulting film growth is modeled as a layer by layer deposition of the individual droplets which reach the wafer surface or as a CVD-like process, depending on whether the droplets form a vapor near the interface or if they deposit a film only after surface collision. 2013 Elsevier B.V. All rights reserved.
منابع مشابه
Preparation and growth of SnS thin film deposited by spray pyrolysis technique
In this paper thin films of tin sulfide (SnS) were deposited on the glass substrates using spray pyrolysis method with the substrate temperatures in the range of 400–600℃, keeping the other deposition parameters constant. In this work the characteristic of SnS thin films investigated. The XRD pattern and optical transmittance of thin films also are discussed. With the change in concen...
متن کاملA Method for Simulating Spray Pyrolysis Deposition in the Level Set Framework
The ability to deposit a thin tin oxide film on CMOS chip dies has enabled the manufacture of modern smart gas sensor devices. Spray pyrolysis deposition is used to grow the required thin films, as it is an affordable deposition technique which can be integrated into a standard CMOS processing sequence. A model for spray pyrolysis deposition is developed and implemented within the Level Set fra...
متن کاملComparison of Deposition Methods of ZnO Thin Film on Flexible Substrate
This paper reports the effect of the different deposition methods towards the ZnO nanostructure crystal quality and film thickness on the polyimide substrate. The ZnO film has been deposited by using the spray pyrolysis technique, sol-gel and RF Sputtering. Different methods give a different nanostructure of the ZnO thin film. Sol gel methods, results of nanoflowers ZnO thin film with the thick...
متن کاملPreparation and characterization of nanostructured S and Fe co-doped TiO2 thin film by ultrasonic-assisted spray pyrolysis method
Nanostructured TiO2 and S and Fe co-doped TiO2 thin films with high transparency were prepared on glass substrate through ultrasonic-assisted spray pyrolysis technique. The effects of doping on morphological, optical an...
متن کاملDeposition and characterization of SnO2:Sb thin films fabricated by the spray pyrolysis method
In this study, thin films of transparent semiconductor tin oxide doped with antimony impurities on the glass substrates with different concentrations of antimony that have been prepared using spray pyrolysis method. The effects of different concentration of antimony on the structural, optical, and electrical properties of the thin films were investigated. Prepared layers were characterized by X...
متن کامل